About: http://webisa.webdatacommons.org/169020906

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a graph showing relationships between discharge gas and etching rate in the case where a permalloy film, a chromium film and an alumina film are etched by ion beam etching techniques;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com