About: http://webisa.webdatacommons.org/176981665

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, a CVD method such as a plasma CVD method or a solution-coating method such as a sol-gel method may be conducted.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de