About: http://webisa.webdatacommons.org/178481361

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the film including nitrogen is used as the blocking oxide film 110, the ability of the blocking oxide film 110 for blocking the diffusion of the metal included in the high-dielectric-constant film 108 can be further improved.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com