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http://webisa.webdatacommons.org/178607870
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http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
Thereafter, P type impurities such as boron are doped into the side surface and the bottom surface in the trench so that a P+ region 727 is formed.
http://www.w3.org/ns/prov#wasQuotedFrom
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