About: http://webisa.webdatacommons.org/178998455

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The apparatus used in the system 80 includes a pair of opposing generally planar surfaces 50 and 60 that face each other and are spaced apart from each other, between which the article, such as a substrate or array, 10 is located.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com