About: http://webisa.webdatacommons.org/183275452

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, when the sample is a material other than a silicon wafer, the ion source and the aperture material will be altered.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com