About: http://webisa.webdatacommons.org/186982060

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For the case in which another material, such as silicon, is also included, the other material could be alternated in equal amounts or in lesser amounts than the hafnium and oxygen depending upon the desired amount of silicon in the film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com