About: http://webisa.webdatacommons.org/187102246

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, referring again to FIG. 3, a layer 30 of material such as silicon dioxide or other material having an accurately known thickness which is thicker than the desired final thickness is deposited on the substrate 32 of wafer 14.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com