About: http://webisa.webdatacommons.org/189077219

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A recessed isolation material 34, comprised of materials such as silicon dioxide, silicon oxynitride, etc., is formed in the trench 32.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com