About: http://webisa.webdatacommons.org/192339803

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For stepwise motion and positioning, for example, first energy such as a voltage for the stepwise motion of the stage is applied to the second driving means 302.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com