About: http://webisa.webdatacommons.org/197723718

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a blank wafer with a flat area on the perimeter of the wafer used for orientation purposes and with a diagram showing the effect of rotation of the wafer;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au