| http://www.w3.org/ns/prov#value | - ve or opening in the first insulating film, [0069] (c) treating the exposed surface of the first insulating film with a plasma of reducing atmosphere, [0070] (d) depositing a first conductive film to cover the surface including the inside wall of the groove or opening and forming a second conductive film to embed therewith the groove or opening, and [0071] (e) removing the
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