About: http://webisa.webdatacommons.org/201547134

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As previously discussed in connection with FIG. 2, the wafer 301 may be subjected to cleaning, rinsing or other processing steps (not shown in FIG. 3) after CMP.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com