About: http://webisa.webdatacommons.org/201574902

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the both films, a element selected from Ta, W, Ti, Mo, Al, Cu, Cr, Nd or alloy material or compound material mainly containing the element may be also formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com