About: http://webisa.webdatacommons.org/203515364

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The protection film 5114 is formed of an insulating film including a carbon layer, a silicon nitride film, or a silicon oxynitride film, in which the insulating film is used in the form of either a single layer or a combined multilayer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com