About: http://webisa.webdatacommons.org/21057753

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The material of the upper overcoat film 9 is not limited to acrylic resin so that other resin such as polymethyl methacrylate, polystyrene, or polyimide may be adopted, provided that such resin can be etched by oxygen plasma etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com