About: http://webisa.webdatacommons.org/212225607

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 2 wherein said layer is an insulator and further comprising depositing an insulator material into said narrow dimensioned region until the region is filled with said material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com