About: http://webisa.webdatacommons.org/212925052

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	matic wafer polishing pressureUS7033251 *Aug 23, 2004Apr 25, 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS7040971Sep 20, 2004May
http://www.w3.org/ns/prov#wasQuotedFrom	google.com