About: http://webisa.webdatacommons.org/215609840

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	During the exposure process, radiant energy, such as ultraviolet light, is directed through the reticle to selectively expose the resist in a desired pattern.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com