About: http://webisa.webdatacommons.org/217507865

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the exposed photo resist and Cu/TiN metal 2 layer may be etched according to a technique such as shown in U.S. pat.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com