About: http://webisa.webdatacommons.org/220768208

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To minimize the thermal discontinuities that occur at the edge of substrate 110 during processing, edge ring 135 is made of the same, or similar, material as the substrate, e.g. silicon or silicon carbide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com