About: http://webisa.webdatacommons.org/227649241

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Structures on the order of 300-500 nm may not be sufficient in a variety of applications, including microelectronics.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk