About: http://webisa.webdatacommons.org/235521062

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An insulating film including a carbon film, the silicon nitride film, or the silicon oxynitride film is used as the passivation film 716.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com