About: http://webisa.webdatacommons.org/244585148

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Different depths can be achieved by varying factors including the implant energy, dose and diffusion temperature.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com