About: http://webisa.webdatacommons.org/245859454

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to cleaning shields and other parts of a physical vapor deposition chamber to remove films deposited thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr