About: http://webisa.webdatacommons.org/249854688

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a flowchart to explain a fabrication process of devices (e.g., semiconductor chips such as an IC and LSI, LCDs, CCDs, and the like).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com