About: http://webisa.webdatacommons.org/252056773

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, Ti and/or the Ti oxide is a particularly preferred material for the thin film mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com