About: http://webisa.webdatacommons.org/253618640

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Useful devices based on single crystal silicon movable membranes can also be envisioned where the intermediate insulating material of the device is a material other than silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com