About: http://webisa.webdatacommons.org/254296915

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Following e-beam lithography, development of resist and other manufacturing processes (such as metal lift-off, etching, etc.) are used to create the sub-master 23.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com