About: http://webisa.webdatacommons.org/258523336

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Optional dielectric layer 5 may be of or include a material such as silicon that is partially or fully oxided and/or nitrided in different embodiments of this invention (e.g., Si3N4 or any other suitable stoichiometry).
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com