| http://www.w3.org/ns/prov#value | - In the case, the dry film 4 a is developed in order to be continuous except for the opening 5. [0152] Next, as illustrated in FIG. 8(d), the copper foil 2 is etched with the dry film 4 a as a mask to form the copper foil 2 a having the predetermined opening 5. [0153] Next, after the dry film 4 a is removed from the copper foil 2 a as illustrated in FIG. 8(e), a masking tape 6 having a thickness of
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