| http://www.w3.org/ns/prov#value | - In this embodiment, substrates 102 and/or 122 of FIGS. 1 and 2 may comprise one or more materials suitable for use as a substrate, including, for example, silicon, silicon dioxide, one or more types of glass, one or more organic substrate materials, such as polyimides (PI), including Kapton???, polyethylene terephthalates (PET), polyethersulfones (PES), polyetherimides (PEI), polycarbonates (PC),
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