| http://www.w3.org/ns/prov#value | - ng step of forming a resist layer by performing heat processing on the coating film; the step of forming a frame having a groove by patterning the resist layer; and the plating step of forming each of the sublayers by plating through the use of the frame, wherein, in the plating step of the step of forming an Nth sublayer where N is an integer that is one or greater, and is (M???1) or smaller, the
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