| http://www.w3.org/ns/prov#value | - In one exemplary implementation, silane is flowed into the chamber at a rate of between about 1 standard cubic centimeters per minute (sccm) and about 100 sccm, more particularly between about 5 sccm and about 20 sccm, for example 5 sccm, while the wafer temperature is maintained at between about 150??? C. and about 350??? C., more specifically between about 200??? C. and about 250??? C., and most
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