| http://www.w3.org/ns/prov#value | - Accordingly, it can be seen that there is an unmet need for an improved cage-type carrier that can be conveniently loaded and unloaded with semiconductor wafers, especially in back-to-back processes in which two wafers are loaded into each slot, with their back surfaces adjacent or abutting to minimize exposure of the back surfaces with reactant gases without disrupting the uniform gas flow betw
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