About: http://webisa.webdatacommons.org/270545487

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Conductive layer 206 may be directionally etched by a suitable process such as reactive ion etching, or any other method readily known in the art, including immersion or spray-type wet etching, and plasma, or ion milling.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr