About: http://webisa.webdatacommons.org/272784587

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, there is a possibility of deteriorating the feature of the physical vapor deposition method that coating can be accomplished at a low temperature.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com