About: http://webisa.webdatacommons.org/273105440

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The photoresist composition containing a polymer having silicon atoms and sulfonium salt units as defined in claim 2, wherein said R1 is a phenyl group.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es