About: http://webisa.webdatacommons.org/276236106

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The intermetal dielectric layer usually consists of a layer of a dielectric and an oxide such as silicon oxide which is deposited by plasma enhanced chemical vapor deposition or other processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com