About: http://webisa.webdatacommons.org/276276790

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These openings may then be filled with suitable conductive material such as tungsten to form a source contact 50, a gate contact 52 and a drain contact 54 associated with field effect device 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com