About: http://webisa.webdatacommons.org/276360077

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, inert gas such as nitrogen, argon, helium, etc. is supplied from the gas inlet pipe 13b to the metal pipe 1, and the vacuum pump 19 is driven to draw the inert gas to the exhaust pipe 19a.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk