About: http://webisa.webdatacommons.org/277327065

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In accordance with one specific form of the invention, the movable MEMS element includes spaced-apart, conductive members, and the layer of selected resistivity comprises an insulating material such as silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es