About: http://webisa.webdatacommons.org/277427008

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An interlayer insulating film 321 is formed of an organic insulating material such as polyimide or acrylic resin so as to level the surface. Needless to say, a silicon oxide formed of TEOS by plasma CVD may be applied.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com