About: http://webisa.webdatacommons.org/284379299

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is noted that, ozone is a gas having the thermal decomposition and a concentration of the ozone gas gives a large effect on the film quality.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com