About: http://webisa.webdatacommons.org/284525015

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Spacers 22 and dielectric 24 can be silicon dioxide, nitride, or other insulating material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au