About: http://webisa.webdatacommons.org/285657189

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Semiconductor Manufacturing Instruments are designed for suitable for the inspection or metrology of bare wafers made of silicon or other materials.
http://www.w3.org/ns/prov#wasQuotedFrom	globalspec.com