About: http://webisa.webdatacommons.org/286375693

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Recently, in the semiconductor industry, the influence of contaminants, such as particles, on the yield of the products has become considerable because of the demand for larger-scale integration on the silicon wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com