About: http://webisa.webdatacommons.org/288234832

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface and bulk-micromachining processes covered topics including Photolithography, Lift Off, Bulk Anisotropic Etch, Chrome/Gold Deposition, Chemical Vapor Deposition and Reactive Ion Etching.
http://www.w3.org/ns/prov#wasQuotedFrom	scme-nm.org