About: http://webisa.webdatacommons.org/290854215

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	(N) gas (optionally along with Ar gas, and/or any other suitable gas), a coating including a repeating layer stack of TiN/VN would be formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com