About: http://webisa.webdatacommons.org/291414001

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As described above, the thin die 20 is suspended on the wafer 70 by thin tethers 78, 178 that can be made of a material such as polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk